Журнал: JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS

Краткое название
J. Micro-Nanolithogr. MEMS MOEMS
Импакт-фактор журнала
1.22
SJR журнала
0.39

Статьи

Impact Factor

Scientific Journal Ranking

2016

1.
Effect of electron beam irradiation on thin metal films on glass surfaces in a submicrometer scale
Filipp Komissarenko
Ivan Mukhin
A.O. Golubok
N.V. Nikonorov
M.A. Prosnikov
A.I. Sidorov
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS
 , vol.
15
 , pp.
013502-01350
 , 2016
[DOI:
10.1117/1.JMM.15.1.013502
 ] [ IF:
1.335
 , SJR:
0.426
 ]